JPH0439772B2 - - Google Patents

Info

Publication number
JPH0439772B2
JPH0439772B2 JP58108683A JP10868383A JPH0439772B2 JP H0439772 B2 JPH0439772 B2 JP H0439772B2 JP 58108683 A JP58108683 A JP 58108683A JP 10868383 A JP10868383 A JP 10868383A JP H0439772 B2 JPH0439772 B2 JP H0439772B2
Authority
JP
Japan
Prior art keywords
forming
insulating film
gate electrode
gate
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58108683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60780A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58108683A priority Critical patent/JPS60780A/ja
Publication of JPS60780A publication Critical patent/JPS60780A/ja
Publication of JPH0439772B2 publication Critical patent/JPH0439772B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP58108683A 1983-06-17 1983-06-17 電界効果トランジスタの製造方法 Granted JPS60780A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58108683A JPS60780A (ja) 1983-06-17 1983-06-17 電界効果トランジスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58108683A JPS60780A (ja) 1983-06-17 1983-06-17 電界効果トランジスタの製造方法

Publications (2)

Publication Number Publication Date
JPS60780A JPS60780A (ja) 1985-01-05
JPH0439772B2 true JPH0439772B2 (en]) 1992-06-30

Family

ID=14491016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58108683A Granted JPS60780A (ja) 1983-06-17 1983-06-17 電界効果トランジスタの製造方法

Country Status (1)

Country Link
JP (1) JPS60780A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0815158B2 (ja) * 1985-09-04 1996-02-14 株式会社日立製作所 ショットキーゲート電界効果トランジスタの製造方法
JP2584986B2 (ja) * 1987-03-10 1997-02-26 三菱電機株式会社 半導体装置の配線構造

Also Published As

Publication number Publication date
JPS60780A (ja) 1985-01-05

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